Flexible substrate processing apparatus
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United States of America Patent
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Nov 8, 2016
Grant Date -
May 30, 2013
app pub date -
Nov 19, 2012
filing date -
Nov 25, 2011
priority date (Note) -
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Abstract
To provide a flexible substrate processing apparatus which allows the stable reduction of an oxide contained in a film-like structure body formed on a flexible substrate. The apparatus has a substrate carrying-out portion where a flexible substrate on which a film-like structure body is formed is unwound; a reduction treatment portion where an oxide contained in the film-like structure body formed on the flexible substrate is electrochemically reduced; a washing portion where the flexible substrate and the film-like structure body are washed; a drying portion where the flexible substrate and the film-like structure body are dried; and a substrate carrying-in portion where the flexible substrate on which the film-like structure body is formed is taken up.
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