Device for generating plasma having a high range along an axis by electron cyclotron resonance (ECR) from a gaseous medium

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United States of America Patent

PATENT NO 9490102
APP PUB NO 20150214008A1
SERIAL NO

14425409

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Abstract

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The device includes at least two coaxial waveguides each formed of a central conductor and of an external conductor to bring microwaves into a treatment chamber. The at least two electromagnetic wave injection guides are combined with a magnetic circuit elongated in one direction. The magnetic circuit surrounding the waveguides by creating a magnetic field capable of achieving an ECR condition close to the waveguides.

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Patent Owner(s)

Patent OwnerAddress
H E F42160 ANDREZIEUX-BOUTHEON

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heau, Christophe Saint Etienne, FR 21 102
Maurin-Perrier, Philippe St Marcellin en Forez, FR 21 59
Schmidt, Beat Montrond les Bains, FR 8 465

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