Vertical differential resonator

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United States of America Patent

PATENT NO 9490769
SERIAL NO

14514096

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Abstract

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A micromechanical device includes a substrate, a micromechanical structure supported by the substrate and configured for overtone resonant vibration relative to the substrate, and a plurality of electrodes supported by the substrate and spaced from the micromechanical structure by respective gaps. The plurality of electrodes include multiple drive electrodes configured relative to the micromechanical structure to excite the overtone resonant vibration with a differential excitation signal, or multiple sense electrodes configured relative to the micromechanical structure to generate a differential output from the overtone resonant vibration.

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Patent Owner(s)

Patent OwnerAddress
MICROCHIP TECHNOLOGY INCORPORATED2355 WEST CHANDLER BLVD CHANDLER AS 85224-6199

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Clark, John Ryan Howell, US 6 39
He, Guohong Ann Arbor, US 6 66
Hsu, Wan-Thai Saline, US 24 266

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