Planar cavity MEMS and related structures, methods of manufacture and design structures

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United States of America Patent

PATENT NO 9493343
SERIAL NO

14840453

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Abstract

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A method of forming at least one Micro-Electro-Mechanical System (MEMS) includes forming a beam structure and an electrode on an insulator layer, remote from the beam structure. The method further includes forming at least one sacrificial layer over the beam structure, and remote from the electrode. The method further includes forming a lid structure over the at least one sacrificial layer and the electrode. The method further includes providing simultaneously a vent hole through the lid structure to expose the sacrificial layer and to form a partial via over the electrode. The method further includes venting the sacrificial layer to form a cavity. The method further includes sealing the vent hole with material. The method further includes forming a final via in the lid structure to the electrode, through the partial via.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Herrin, Russell T Essex Junction, US 24 375
Maling, Jeffrey C Grand Isle, US 43 520
Stamper, Anthony K Williston, US 613 6578

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