Polishing composition

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9493678
APP PUB NO 20160208141A1
SERIAL NO

14597737

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A polishing composition comprising abrasive particles, a compound having hexavalent molybdenum or pentavalent vanadium, an anionic additive, a halogen oxides compound or salts thereof, and a carrier solvent is provided herein. The polishing composition is suitable for chemical mechanical polishing process of SiGe, Si and SiO2 substrates. The compound having hexavalent molybdenum or pentavalent can effectively raise the removal rate for SiGe and Si substrates, and increase the polishing selectivity of SiGe and Si relative to SiO2, simultaneously.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
FERRO CORPORATION6060 PARKLAND BOULEVARD SUITE 250 MAYFIELD HEIGHTS OH 44124

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Song Yuan Zhongli, TW 2 2
Ho, Ming Che Zhongli, TW 3 2
Ho, Yun Lung Zhongli, TW 1 2
Lee, Chun Chieh Zhongli, TW 6 29
Lu, Ming Hui Zhongli, TW 2 2

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
11.5 Year Payment $7400.00 $3700.00 $1850.00 May 15, 2028
Fee Large entity fee small entity fee micro entity fee
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00