MEMS device, electronic apparatus, and manufacturing method of MEMS device

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United States of America Patent

PATENT NO 9496806
APP PUB NO 20140035433A1
SERIAL NO

13953092

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Abstract

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A MEMS device is a MEMS device having a MEMS vibrator which includes a plurality of MEMS constituent elements laminated and formed above a first foundation portion which is laminated above a main surface of a wafer substrate, and the MEMS constituent elements are laminated above a first oxide film and a nitride film so as to cover an opening which is formed in the nitride film and exposes a second foundation portion above which the nitride film is laminated.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Matsuzawa, Yusuke Chino, JP 22 42

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