Capacitive transducer, capacitive transducer manufacturing method, and object information acquisition apparatus
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United States of America Patent
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Nov 15, 2016
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N/A
app pub date -
Jun 19, 2013
filing date -
Jul 6, 2012
priority date (Note) -
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Abstract
Provided is a capacitive transducer having broadband frequency characteristics. The capacitive transducer includes an element which has multiple kinds of cells, each cell including: a first electrode; a vibrating film including a second electrode, the second electrode being opposed to the first electrode with a gap; and a support portion that supports the vibrating film so as to form the gap. The multiple kinds of cells have different ratios of an area of one of the first electrode and the second electrode to an area of the gap when viewed from a normal direction of the vibrating film. The first electrodes or the second electrodes in the multiple kinds of cells are electrically connected together.
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