Apparatus, method and system for spectrometry with a displaceable waveguide structure

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United States of America Patent

PATENT NO 9500827
SERIAL NO

14317132

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Abstract

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Techniques and mechanisms for a monolithic photonic integrated circuit (PIC) to provide spectrometry functionality. In an embodiment, the PIC comprises a photonic device, a first waveguide and a second waveguide, wherein one of the first waveguide and the second waveguide includes a released portion which is free to move relative to a substrate of the PIC. During a metering cycle to evaluate a material under test, control logic operates an actuator to successively configure a plurality of positions of the released portion relative to the photonic device. In another embodiment, light from the first waveguide is variously diffracted by a grating of the photonic device during the metering cycle, where portions of the light are directed into the second waveguide. Different wavelengths of light diffracted into the second waveguide may be successively detected, for different positions of the released portion, to determine spectrometric measurements over a range of wavelength.

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Patent Owner(s)

  • INTEL CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heck, John Berkeley, US 110 1913
Hutchison, David N Santa Clara, US 15 354
Kim, Kyu Hyun Ann Arbor, US 13 27
Rong, Haisheng Pleasanton, US 60 628
Xu, Shengbo Santa Clara, US 14 119

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