MEMS devices made with isotopic materials

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United States of America Patent

PATENT NO 9503046
APP PUB NO 20120313480A1
SERIAL NO

13492075

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Abstract

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A MEMS or NEMS device with at least one component made of a non-naturally occurring isotope material. The refined isotopic material provides advantages to device operation such as reduced mechanical loss, increased breakdown voltage, improved tunability and other advantages.

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Patent Owner(s)

Patent OwnerAddress
CYMATICS LABORATORIES CORP425 N CRAIG STREET SUITE 200 PITTSBURGH PA 15213

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Guillou, David Francois Pittsburgh, US 7 73
Sinha, Rajarishi Pittsburgh, US 19 230

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