MEMS actuator with discretely controlled multiple motions

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United States of America Patent

PATENT NO 9505606
APP PUB NO 20080309190A1
SERIAL NO

11762683

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Abstract

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A MEMS (micro electro mechanical system) actuator with discretely controlled multiple motions comprises bottom layer, stepper plate, support, and motion plate. The multiple motion of the motion plate is generated by the electrostatically actuated stepper plates and geometrically predetermined supports. By introducing the MEMS actuator with discretely controlled multiple motions, simple motion control can be achieved by digital controlling and only single voltage is needed for motion control of the motion plate.

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Patent Owner(s)

Patent OwnerAddress
STEREO DISPLAY INC980 E ORANGETHORPE AVE SUITE F ANAHEIM CA 92801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Gyoung II Seoul, KR 3 6
Seo, Cheong Soo Seongnam, KR 67 1118
Sohn, Jin Young Fullerton, US 30 292

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