Polishing composition

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United States of America Patent

PATENT NO 9505951
APP PUB NO 20150315418A1
SERIAL NO

14440216

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Abstract

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[Problem] Provided is a polishing composition that can sufficiently maintain a high polishing rate for a barrier layer and an insulating film and suppress the occurrence of a surface defect such as erosion or fang.

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Patent Owner(s)

  • FUJIMI INCORPORATED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kachi, Yoshihiro Kiyosu, JP 5 33
Onishi, Shogo Kiyosu, JP 38 58
Umeda, Takahiro Kiyosu, JP 30 129
Yoshikawa, Takeshi Kiyosu, JP 34 183

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