Vacuum system

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United States of America Patent

PATENT NO 9506478
APP PUB NO 20130180596A1
SERIAL NO

13350418

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present invention relates to a vacuum system for evacuating a chamber of a metallurgical processing system. The system comprises a vacuum pumping arrangement for evacuating gas from the chamber, a foreline connecting the vacuum pumping arrangement to the chamber, a filter volume located in the foreline for filtering gas evacuated from the chamber along the foreline, and a by-pass line connecting the vacuum pumping arrangement to the chamber and arranged to by-pass the filter volume selectively dependent on monitored characteristics of the degassing chamber or the vacuum system.

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Patent Owner(s)

  • EDWARDS LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Galtry, Michael Andrew Worthing, GB 9 8
Legge, Graham Thomas Philadelphia, US 1 0

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