Combined crystal retainer and contact system for deposition monitor sensors
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United States of America Patent
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Nov 29, 2016
Grant Date -
Nov 20, 2014
app pub date -
May 17, 2013
filing date -
May 17, 2013
priority date (Note) -
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Abstract
A combination retainer and electrical contact mechanism for a deposition monitor sensor includes a sensor body and a removable flexible electrical contact spanning between a fixed electrical (contact) element in the sensor's body and one face of an associated monitor crystal. A retainer insulates or insures electrical isolation of the spanning electrical contact from unwanted contact to electrically grounded components in which at least one of the retainer and crystal holder include features that maintain the electrical contact with the retainer in order to provide a single mechanism.
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