Wafer transport robot

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9508581
APP PUB NO 20140321957A1
SERIAL NO

14365431

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Abstract

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An object is to transmit an operation of a first parallel link to a second parallel link through a plurality of rotatably supported arms, to prevent the second parallel link from meandering or rolling so that a wafer can be transported smoothly.

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Patent Owner(s)

Patent OwnerAddress
TAZMO CO LTD5311 HAGA KITA-KU OKAYAMA-SHI OKAYAMA 7011221 ?7011221

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Imai, Shinichi Ibara, JP 92 1609
Nishijima, Yoshiki Ibara, JP 3 471
Saino, Kohsaku Ibara, JP 1 0
Sakata, Kosuke Ibara, JP 19 480
Tsukimoto, Hiroaki Ibara, JP 3 471
Yamazoe, Katsuhiro Ibara, JP 7 593

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