Parallel single substrate marangoni module
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United States of America Patent
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Nov 29, 2016
Grant Date -
Dec 6, 2012
app pub date -
Jun 4, 2012
filing date -
Jun 3, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate drying apparatus for drying a width of a surface of a substrate in a liquid. The substrate drying apparatus has a liquid tank containing the liquid. An injection nozzle is coupled to the liquid tank, the injection nozzle having a continuous knife edge injection surface across the width of the surface of the substrate. A drain is coupled to the injection nozzle, the drain having a continuous drain surface substantially parallel to the continuous knife edge injection surface and across the width of the surface of the substrate. The liquid forms a meniscus between the continuous drain surface and the width of the surface of the substrate. The injection nozzle directs a vapor at the meniscus.
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