Shot data generation method and multi charged particle beam writing method

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United States of America Patent

PATENT NO 9514914
APP PUB NO 20150294836A1
SERIAL NO

14661496

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Abstract

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A shot data generation method includes inputting writing data for writing a pattern on a target object with multi charged particle beams, and generating shot data for each beam of the multi charged particle beams by converting the writing data and using one of a first code indicating a first irradiation time period having been set beforehand, a second code indicating an irradiation time period being zero, and a third code indicating neither the first irradiation time period nor the irradiation time period being zero.

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Patent Owner(s)

  • NUFLARE TECHNOLOGY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inoue, Hideo Kanagawa, JP 90 1224

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