UV irradiation device for clocked operation
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United States of America Patent
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Dec 13, 2016
Grant Date -
Dec 31, 2015
app pub date -
Oct 22, 2013
filing date -
Oct 23, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
An irradiation device including at least one radiation source, which emits both UV-radiation and W-radiation, i.e. visible light and/or IR radiation. The device includes a transport device for delivering substrates to be irradiated. At least one wavelength-selective filter reflects UV-radiation at an angle of 45° and transmits W-radiation. Means for the absorption of IR radiation are arranged downstream of the optical filter in the propagation direction in the beam path of the W-radiation not deflected by the wavelength-selective filter. The means for the absorption of IR radiation are also designed to absorb visible light and UV rays, and the irradiation device includes movement means in order to guide the wavelength-selective filter into and out of the beam path of the radiation source.
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