Probe guide plate and method for manufacturing the same

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United States of America Patent

PATENT NO 9523716
APP PUB NO 20140266274A1
SERIAL NO

14202701

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Abstract

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There is provided a probe guide plate. The probe guide plate includes: a substrate having a through hole for guiding a probe, which is formed through the substrate, wherein the substrate includes a first main surface and a second main surface opposite to the first main surface; and a first insulating film formed on an inner wall of the through hole and on the first and second main surfaces of the substrate such that portions of the first and second main surfaces of the substrate are exposed.

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Patent Owner(s)

Patent OwnerAddress
SHINKO ELECTRIC INDUSTRIES CO LTDNAGANO
JAPAN ELECTRONIC MATERIALS CORPORATION2-5-13 NISHINAGASU-CHO AMAGASAKI-SHI HYOGO 6600805

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujihara, Kosuke Nagano, JP 8 26
Shiraishi, Akinori Nagano, JP 80 1156

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