Flexible micromachined transducer device and method for fabricating same

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United States of America Patent

PATENT NO 9525119
APP PUB NO 20150158052A1
SERIAL NO

14103672

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Abstract

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Techniques and structures for providing flexibility of a micromachined transducer array. In an embodiment, a transducer array includes a plurality of transducer elements each comprising a piezoelectric element and one or more electrodes disposed in or on a support layer. The support layer is bonded to a flexible layer including a polymer material, wherein flexibility of the transducer array results in part from a total thickness of a flexible layer. In another embodiment, flexibility of the transducer array results in part from one or more flexural structures formed therein.

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Patent Owner(s)

Patent OwnerAddress
FUJIFILM DIMATIX INC109 ETNA ROAD LEBANON NH 03766

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hajati, Arman Santa Clara, US 54 982
Imai, Darren Todd Los Gatos, US 3 16
Latev, Dimitre San Jose, US 3 52
Tran, Ut San Jose, US 50 3810

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