Methods and devices for correcting errors in atomic force microscopy

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United States of America Patent

PATENT NO 9527732
APP PUB NO 20120079635A1
SERIAL NO

13190643

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Abstract

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In certain embodiments, a probe scans a surface to produce a first scan. The first scan is used to estimate a vertical offset for scanning the surface to produce a second scan. In certain embodiments, an AFM device engages a probe to a surface using a piezo voltage. The probe scans the surface to produce a first scan. The first scan is used to estimate a vertical offset such that the probe uses the piezo voltage to engage the surface for a second scan at a different vertical position.

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Patent Owner(s)

  • SEAGATE TECHNOLOGY LLC

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gunderson, Peter Ellsworth, US 10 44
Liu, Huiwen Eden Prairie, US 18 131
Zhou, Lin Eagan, US 202 990

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