Optical fiber pressure sensor with uniform diaphragm and method of fabricating same
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United States of America Patent
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Dec 27, 2016
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N/A
app pub date -
Jun 29, 2010
filing date -
Jun 29, 2009
priority date (Note) -
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Abstract
An optical fiber sensor (100) can be used to measure pressure with high sensitivity and fine resolution. As a (108) at the end of the sensor expands or contracts, the spectrum of a beam reflected from the end of fiber shifts, producing a change linked to pressure exerted on the sensor. Novel aspects of the present inventive sensor include the direct bonding of a silica thin film diaphragm (110) to the optical fiber with localized or confined heating and a uniform thickness of the diaphragm. The resulting sensor has a diameter that matches the diameter of the optical fiber. Because the sensor is all silica, it does not from temperature-induced error. In addition, the sensor can be very sensitive because the diaphragm can be very thin; it can also make highly repeatable measurements due to its very uniform thickness.
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