Dual control modes
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United States of America Patent
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Dec 27, 2016
Grant Date -
Sep 18, 2014
app pub date -
Feb 19, 2014
filing date -
Mar 15, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
Systems and methods for using variables based on a state associated with a plasma system. A method includes determining whether the state associated with the plasma system is a first state or a second state and determining a first variable upon determining that the state is the first state. The first variable is determined based on a measurement at a communication medium. The method further includes determining a second variable upon determining that the state is the second state. The second variable is determined based on a measurement at the communication medium. The method includes determining whether the second variable exceeds a first threshold, providing an instruction to reduce power supplied to a plasma chamber upon determining that the second variable exceeds the first threshold, and providing an instruction to increase power supplied to the plasma chamber upon determining that the second variable is below the first threshold.
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