Forming layers of materials over small regions by selective chemical reaction including limiting enchroachment of the layers over adjacent regions

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9530733
APP PUB NO 20160190060A1
SERIAL NO

14909736

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A method of an aspect includes forming a first thicker layer of a first material over a first region having a first surface material by separately forming each of a first plurality of thinner layers by selective chemical reaction. The method also includes limiting encroachment of each of the first plurality of thinner layers over a second region that is adjacent to the first region. A second thicker layer of a second material is formed over the second region having a second surface material that is different than the first surface material.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • INTEL CORPORATION

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Blackwell, James M Portland, US 52 540
Bristol, Robert L Portland, US 59 775
Clendenning, Scott B Portland, US 82 805
Gstrein, Florian Portland, US 82 972
Han, Eungnak Beaverton, US 43 212
Hourani, Rami Portland, US 66 210
Kloster, Grant M Lake Oswego, US 45 1578
Roberts, Jeanette M Hillsboro, US 94 2384
Romero, Patricio E Portland, US 25 630

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Jun 27, 2024
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jun 27, 2028
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00