Metal nitride material for thermistor, method for producing same, and film type thermistor sensor

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United States of America Patent

PATENT NO 9534961
APP PUB NO 20150061821A1
SERIAL NO

14469184

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Abstract

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Provided are a metal nitride material for a thermistor, which has high reliability and high heat resistance and can be directly deposited on a film or the like without firing, a method for producing the same, and a film type thermistor sensor.

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Patent Owner(s)

Patent OwnerAddress
MITSUBISHI MATERIALS CORPORATION2-3 MARUNOUCHI 3-CHOME CHIYODA-KU TOKYO 100-8117

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujita, Toshiaki Naka, JP 44 312
Nagatomo, Noriaki Naka, JP 31 111
Tanaka, Hiroshi Naka, JP 1068 12184

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