Integrated transducer provided with a temperature sensor and method for sensing a temperature of the transducer

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United States of America Patent

PATENT NO 9534974
APP PUB NO 20130215931A1
SERIAL NO

13757146

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Abstract

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A pressure sensor includes a body made of semiconductor material having a first type of conductivity and a pressure-sensitive structure having the first type of conductivity defining a suspended membrane. One or more piezoresistive elements having a second type of conductivity (P) are formed in the suspended membrane. The piezoresistive elements form, with the pressure-sensitive structure, respective junction diodes. A temperature sensing method includes: generating a first current between conduction terminals common to the junction diodes; detecting a first voltage value between the common conduction terminals when the first current is supplied; and correlating the detected first voltage value to a value of temperature of the diodes. The temperature value thus calculated can be used for correcting the voltage signal generated at output by the pressure sensor when the latter is operated for sensing an applied outside pressure which deforms the suspended membrane.

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Patent Owner(s)

  • STMICROELECTRONICS S.R.L.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baldo, Lorenzo Bareggio, IT 79 661
Chiricosta, Mario Messina, IT 16 54
Maiore, Mario Catania, IT 7 32
Rose, Paul Georges Marie Lodi, IT 3 22
Vaiana, Michele Paterno, IT 28 126

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