Pattern inspection method and pattern inspection apparatus
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United States of America Patent
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Jan 3, 2017
Grant Date -
Aug 28, 2014
app pub date -
Feb 20, 2014
filing date -
Feb 25, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A pattern inspection method includes acquiring an image of a pattern in a stripe region concerned, regarding each of stripe regions of the first group each not including an adjacent stripe region in plural stripe regions obtained by virtually dividing an inspection region of a target object on which patterns have been formed into the plural stripe regions each partially overlapping an adjacent stripe region, wherein the acquiring is performed using laser lights or electron beams, in a longitudinal direction of the stripe region of the first group, and acquiring an image of a pattern in a stripe region concerned, regarding each of stripe regions of the second group each not including an adjacent stripe region, in remaining stripe regions other than the first group stripe regions, wherein the acquiring is performed using laser lights or electron beams, in the longitudinal direction of the stripe region of the second group.
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