Lamp for rapid thermal processing chamber
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United States of America Patent
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Jan 3, 2017
Issued Date -
N/A
app pub date -
Feb 15, 2007
filing date -
Feb 15, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
A lamp assembly for the lamp assembly adapted for use in a substrate thermal processing chamber to heat the substrate to temperatures up to at least about 1100° C. is disclosed. In one embodiment, the lamp assembly comprises a bulb enclosing at least one radiation generating filament attached to a pair of leads, the bulb having an inner surface and an outer surface, a lamp base configured to receive the pair of leads and at least a portion of the bulb having a surface treatment adapted to reflect light away from the lamp base. In another embodiment, a sleeve covers the lamp base, which has a cross-sectional area less than about 1.2 times the cross-sectional area of the bulb.
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