Programmable electrical fuse in keep out zone

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9536829
APP PUB NO 20160079166A1
SERIAL NO

14483258

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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An method including forming a back end of the line (BEOL) wiring portion directly on top of a semiconductor base portion, the BEOL wiring portion including a plurality of layers of a metallic material and a dielectric material and excluding a semiconductor material, forming a through-substrate via through the BEOL wiring portion and the semiconductor base portion, forming an electronic fuse in the BEOL wiring portion adjacent to the through-substrate via, and forming a guard ring in the BEOL wiring portion surrounding the through-substrate via and the electronic fuse in the BEOL wiring portion, the through-substrate via in the semiconductor base portion being free from the guard ring.

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First Claim

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

International Classification(s)

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  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Farooq, Mukta G Hopewell Junction, US 212 3370
Sullivan, Timothy D Underhill, US 138 1681
Wang, Ping-Chuan Hopewell Junction, US 189 1892
Zhang, Lijuan Fremont, US 61 286

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