Liquid dispensing apparatus, coating apparatus for same, and liquid dispensing method
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United States of America Patent
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Jan 10, 2017
Grant Date -
Sep 3, 2015
app pub date -
Mar 7, 2013
filing date -
Mar 8, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A liquid dispensing apparatus (1) includes a liquid contact member (2) that has measuring bores (11, 11). A first piston (3) slides in the first measuring bore (11) and a second piston (3) sliding in the second measuring bore (11). A supply channel (5) communicates with a storage unit (17). An ejection channel (6) communicates with a nozzle (18). A switching valve (4) is disposed in a space in the liquid contact member (2), and that has a first position and a second position. A valve driving mechanism (8) operates the switching valve (4). A piston driving mechanism (9) operates an arm (19) connected to the first and second pistons. The first and second measuring bores are arranged to oppose to each other on both sides of the switching valve (4), and the supply channel (5) and the ejection channel (6) are arranged adjacent to the switching valve.
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