Imprint method and imprint system
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United States of America Patent
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Jan 10, 2017
Grant Date -
Jan 24, 2013
app pub date -
Jun 21, 2012
filing date -
Jul 21, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
According to one embodiment, an imprint method comprises coating a photo-curable organic material on a film to be processed, bringing a concave-convex pattern of a template into contact with the photo-curable organic material, applying a force to the template in such a state that the template is brought into contact with the photo-curable organic material, curing the photo-curable organic material by irradiating light onto the photo-curable organic material, in such a state that the template is brought into contact with the photo-curable organic material, and releasing the template from the photo-curable organic material after the light irradiation. The force applied to the template corresponds to a gap between a surface of the film to be processed and the template.
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