Apparatus and method for transporting wafers between wafer carrier and process tool under vacuum

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United States of America Patent

PATENT NO 9543180
APP PUB NO 20160035596A1
SERIAL NO

14449838

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Importance

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Abstract

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An integrated transport device for a wafer carrier includes: an evacuatable chamber for accommodating therein a wafer carrier having a front opening with a cover; a rotatable platform for placing the wafer carrier thereon in the chamber; and an opening/closing device for opening and closing the cover of the wafer carrier placed on the platform at a first position, wherein the platform rotates to set the wafer carrier at the first position and a second position for transporting a wafer to a wafer-handling chamber.

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Patent Owner(s)

  • ASM IP HOLDING B.V.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kamiya, Tatsuo Tsubame, JP 2 629

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