Sensor element, force detection device, robot, electronic component transport device, electronic component inspection device, and component processing device
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United States of America Patent
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Jan 17, 2017
Grant Date -
Apr 30, 2015
app pub date -
Oct 27, 2014
filing date -
Oct 31, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A sensor element includes, when three axes orthogonal to one another are set to be an A-axis, a B-axis, and a C-axis, first piezoelectric plate that is configured to have an X cut quartz crystal plate and outputs a charge in response to an external force along the A-axis direction, second piezoelectric plate that is configured to have a Y cut quartz crystal plate, is stacked in the A-axis direction with the first piezoelectric plate, and outputs a charge in response to the external force in the B-axis direction, and third piezoelectric plate that is configured to have a Y cut quartz crystal plate, is stacked in the A-axis direction so as to interpose the second piezoelectric plate between the first piezoelectric plate and the third piezoelectric plate and be arranged to turn around the A-axis, and outputs a charge in response to the external force in the C-axis direction.
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