Metrology target indentification, design and verification

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United States of America Patent

PATENT NO 9546946
APP PUB NO 20150233814A1
SERIAL NO

14361610

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Abstract

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Metrology tools are provided, which comprise both active and passive vibration isolation devices, passive or active isolation systems such as constrained layer dampers, particle impact dampers or liquid impact dampers, and/or noise cancellation transducers, combined in different supporting structures of the metrology tool to dampen and reduce vibrations at a wide range of frequencies and intensities, and to which frequency range spectral analysis and optimization may be applied to determine specific tool configurations according to the provided principles.

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Patent Owner(s)

  • KLA-TENCOR CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Golovanevsky, Boris Haifa, IL 14 470
Sapiens, Noam Cupertino, US 49 777

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