Near-field exposure mask, resist pattern forming method, device manufacturing method, near-field exposure method, pattern forming method, near-field optical lithography member, and near-field nanoimprint method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9550322
APP PUB NO 20150246478A1
SERIAL NO

14683794

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A near-field exposure mask according to an embodiment includes: a silicon substrate; and a near-field light generating unit that is formed on the silicon substrate, the near-field light generating unit being a layer containing at least one element selected from the group consisting of Au, Al, Ag, Cu, Cr, Sb, W, Ni, In, Ge, Sn, Pb, Zn, Pd, and C, or a film stack formed with layers made of some of those materials.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • TOSHIBA MEMORY CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hotta, Yasuyuki Tokyo, JP 80 1663
Kashiwagi, Hiroyuki Fujisawa, JP 24 63
Mori, Shigehiko Kawasaki, JP 21 36
Shida, Naomi Tokyo, JP 73 954
Tada, Tsukasa Tokyo, JP 40 379
Todori, Kenji Yokohama, JP 51 473
Yamada, Ko Yokohama, JP 29 63
Yamagiwa, Masakazu Tokyo, JP 72 157
Yoneda, Ikuo Yokohama, JP 55 558
Yoshimura, Reiko Kawasaki, JP 45 181

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Jul 24, 2024
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jul 24, 2028
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00