Metal liftoff tools and methods
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United States of America Patent
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Jan 24, 2017
Grant Date -
Oct 1, 2015
app pub date -
Jun 11, 2015
filing date -
Mar 14, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
In certain embodiments the metal liftoff tool comprises an immersion tank for receiving a wafer cassette with wafers therein, the immersion tank including an inner weir, a lifting and lowering mechanism capable of raising and lowering the wafer cassette while submerged in fluid in the immersion tank, low pressure high velocity primary spray jets for stripping the metal, the primary spray jets positioned at opposing sides of the immersion tank parallel to the wafer surfaces planes, and secondary spray jets for pressure equalization force, positioned at the bottom of the immersion tank. A wafer lift insert is positioned at the bottom of the immersion tank to receive and periodically lift the wafers within the cassette.
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