Pressure sensor with geter embedded in membrane

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United States of America Patent

PATENT NO 9557238
APP PUB NO 20160025583A1
SERIAL NO

14340765

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Abstract

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Various exemplary embodiments relate to a pressure sensor including a pressure sensitive membrane suspended over a cavity, wherein the membrane is secured by a set of anchors to a substrate; and a getter material embedded in the membrane, wherein the surface of the getter is in contact with any gas within the cavity, and wherein two end points of the getter material are attached through the substrate by anchors capable of conducting through the substrate an electrical current through the getter material.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
AMS INTERNATIONAL AGZURICH54

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Besling, Willem Eindhoven, NL 4 1
Goossens, Martijn Eindhoven, NL 13 77
Oldsen, Marten Kleve, DE 16 79
Pijnenburg, Remco Eindhoven, NL 4 12
Steeneken, Peter Eindhoven, NL 9 30
van, der Avoort Casper Prinsenhof, DE 18 62

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