Method of static scaling of image in holographic lithography
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United States of America Patent
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Jan 31, 2017
Grant Date -
Jul 2, 2015
app pub date -
May 1, 2014
filing date -
Dec 28, 2013
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Abstract
Proposed is a method of static scaling of an image in holographic lithography. The method consists of generating a final virtual digital hologram of the original pattern through a sequence of mathematical calculations with participation of a virtual coherent light source having a predetermined wavelength λ1 and producing an actual hologram on the basis of the virtual digital hologram of the original pattern. The obtained hologram can be used for forming an actual original pattern in a predetermined size. When it is necessary to produce the original pattern in another size, this can be done by static scaling by merely selecting another wavelength for the laser source with adjustable wavelength. The method allows determining the wavelength range in which scalability is possible with substantially homothetic transformation of the image.
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