MEMS device with protective structure

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United States of America Patent

PATENT NO 9568386
APP PUB NO 20150253212A1
SERIAL NO

14479144

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Abstract

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According to one embodiment, a MEMS device includes a variable capacitor including a lower electrode fixed to a substrate and a movable upper electrode provided above the lower electrode, a pressure-sensitive section covering the variable capacitor and connected to the upper electrode, configured to displace according to a pressure applied, and a protective structure provided on an outer side of the pressure-sensitive section.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hayashi, Yumi Zama Kanagawa, JP 39 166

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