Integrated circuit configured with two or more single crystal acoustic resonator devices

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United States of America Patent

PATENT NO 9571061
SERIAL NO

14298100

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Abstract

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A configurable single crystal acoustic resonator (SCAR) device integrated circuit. The circuit comprises a plurality of SCAR devices numbered from 1 through N, where N is an integer of 2 and greater. Each of the SCAR device has a thickness of single crystal piezo material formed overlying a surface region of a substrate member. The single crystal piezo material is characterized by a dislocation density of less than 1012 defects/cm2.

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Patent Owner(s)

  • AKOUSTIS;AKOUSTIS, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shealy, Jeffrey B Cornelius, US 122 1187

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