Rinsing and drying for electrochemical processing

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9574283
APP PUB NO 20160076167A1
SERIAL NO

14948259

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Abstract

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An electroplating/etch apparatus including a fluid jet and a dryer present over the tank containing the electrolyte for the electroplating/etch process. The fluid jet and the dryer remove excess liquids, such as electrolyte, from the component being plated or etched, e.g., working electrode. The working electrode is present on a holder that traverses from a first position within the tank during a plating or etch operation to a second position that is outside the containing the plating electrolyte. The fluid jet rinses the working electrode when the holder is in the second position, and the forced air dryer blows any remaining fluid from the fluid jet and the electrolyte from the working electrode into the tank.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arvin, Charles L Poughkeepsie, US 153 714
Bezama, Raschid J Mahopac, US 66 892
Deligianni, Hariklia Tenafly, US 205 2205

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