Particle beam forming device
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United States of America Patent
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Feb 21, 2017
Grant Date -
Sep 17, 2015
app pub date -
Oct 17, 2013
filing date -
Dec 3, 2012
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Abstract
A particle beam forming device for forming either a linear or conical particle beam from a particle source in which particles are dispersed in a gas, includes: a reduced-pressure vessel in which pressure is reduced; a particle beam generating unit, which has one end arranged outside of the reduced-pressure vessel and an other end arranged inside the reduced-pressure vessel, and which captures the particle source from outside the reduced-pressure vessel and introduces the particle beam into the reduced-pressure vessel; and a particle beam evaluating unit for evaluating a spatial distribution of the particle beam inside the reduced-pressure vessel.
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