Plasma wavguide using step part and block part

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United States of America Patent

PATENT NO 9576774
APP PUB NO 20140292195A1
SERIAL NO

14225693

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Abstract

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In a magnetron and a plasma waveguide through which a microwave oscillated from the magnetron moves, there is provided a plasma waveguide including a plurality of step parts formed at any one side on an inner side surface of the waveguide, and a block part of a predetermined height formed at any other side on the inner side surface of the waveguide, wherein the block part is formed at a side opposite to a boundary part between the plurality of step parts.

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Patent Owner(s)

  • TRIPLE CORES KOREA CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Eum, Min Heum Gyeonggi-do, KR 1 12
Kang, Sung Ok Gyeonggi-do, KR 1 12
Kim, Ik Nyun Gyeonggi-do, KR 3 18

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