Device for alignment of two substrates

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United States of America Patent

PATENT NO 9576825
APP PUB NO 20120237328A1
SERIAL NO

13497602

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Abstract

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Device and method for alignment of a first contact surface of a first substrate with a second contact surface of a second substrate which can be held on a second platform. The device includes first X-Y positions of first alignment keys located along the first contact surface, and second X-Y positions of second alignment keys which correspond to the first alignment keys and which are located along the second contact surface, wherein the first contact surface can be aligned based on the first X-Y positions in the first alignment position and the second contact surface can be aligned based on the second X-Y positions in the second alignment position.

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Patent Owner(s)

Patent OwnerAddress
EV GROUP E THALLNER GMBH1 DI ERICH THALLNER STRASSE ST FLORIAN AM INN A-4782

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Figura, Daniel Piestany, SK 18 46

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