High temperature gas line heater system including silicone foam rubber
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United States of America Patent
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Feb 21, 2017
Grant Date -
Jan 30, 2014
app pub date -
Jul 24, 2013
filing date -
Jul 24, 2012
priority date (Note) -
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Abstract
A semi-flexible laminar silicone foam rubber-base heater for high temperature gas supply and exhaust lines used in microelectronic semiconductor fabrication uses superimposed adhesively bonded layers of an etched foil heater element containing layer, a high-to-low heat thermal transition layer, a thermal fuse laden silicone foam rubber insulation layer and a durable wrapping layer. The system can provide for the combined use of highly controllable etched foil heater elements, clean silicone foam rubber insulation, and inexpensive mechanical thermal fuses safely in a high heat gas supply and exhaust line environment.
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