Patterned metallization handle layer for controlled spalling

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United States of America Patent

PATENT NO 9578736
SERIAL NO

14581445

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Abstract

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A handle substrate having at least one metallization region is provided on a stressor layer that is located above a base substrate such that the at least one metallization region is in contact with a surface of the stressor layer. An upper portion of the base substrate is spalled, i.e., removed, to provide a structure comprising, from bottom to top, a spalled material portion of the base substrate, the stressor layer and the handle substrate containing the at least one metallization region in contact with the surface of the stressor layer.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION;KING ABDULAZIZ CITY FOR SCIENCE AND TECHNOLOGY

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Al-Saud, Turki bin Saud bin Mohammed Riyadh, SA 3 6
Bedell, Stephen W Wappingers Falls, US 409 5528
Fogel, Keith E Hopewell Junction, US 270 4144
Lauro, Paul A Brewster, US 85 1914
Sadana, Devendra K Pleasantville, US 897 9915

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