Substrate edge clamping force tester
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United States of America Patent
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Feb 28, 2017
Grant Date -
Jun 9, 2016
app pub date -
Dec 3, 2014
filing date -
Dec 3, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
An apparatus and methods for measuring the clamping force applied to a substrate by clamping elements of a substrate holder. The apparatus include a pneumatic cylinder, a two position, three way valve and a pressure gauge. In a first position of the valve, the gauge and a bore of the cylinder are vented or pre-pressurized. In a second position of the valve, the bore and gauge are isolated. The methods include placing the apparatus with the valve in the first position between clamping elements set to a non-clamping position, moving the valve to the second position, setting the clamping elements to a clamping position and reading a pressure on the gauge.
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