Liquid crystal modulator for detecting a defective substrate and inspection apparatus having the same
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United States of America Patent
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Feb 28, 2017
Grant Date -
Mar 26, 2015
app pub date -
Apr 8, 2014
filing date -
Sep 23, 2013
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Abstract
An inspection apparatus for detecting a defect of a substrate is provided. The inspection apparatus includes a liquid crystal modulator, a light emitting unit, a beam splitter, and a measurement unit. The liquid crystal modulator includes a reflection layer, a liquid crystal layer, an electrode, and a polarizer. The reflection layer reflects a light. The sensor layer includes a hybrid aligned nematic liquid crystal. The electrode is provided on the liquid crystal layer. The polarizer is provided on the electrode.
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