Installation fixture for elastomer bands

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United States of America Patent

PATENT NO 9583377
APP PUB NO 20150170942A1
SERIAL NO

14109400

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Importance

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Abstract

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An installation fixture adapted to mount an elastomer band in a mounting groove around a semiconductor substrate support used for supporting a semiconductor substrate in a plasma processing chamber is disclosed, which includes an annular ring having a vertically extending portion on an outer edge of the ring and adapted to receive the elastomer band, and a base plate configured to be attached to the annular ring, the base plate having a plurality of radially extending portions adapted to receive a plurality of mechanical fasteners at locations corresponding to mounting holes in the semiconductor substrate support.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chhatre, Rish Danville, US 5 36
Schaefer, David Fremont, US 35 243

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