Disk-shaped workpiece dividing method

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United States of America Patent

PATENT NO 9586331
APP PUB NO 20140298968A1
SERIAL NO

14215368

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Abstract

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A dividing method for a disk-shaped workpiece having a plurality of first division lines and a plurality of second division lines intersecting the first division lines. The workpiece is cut along the first and second division lines by using a cutting blade in a down cut manner as supplying a cutting fluid to the cutting blade, wherein the workpiece is fully cut in a thickness direction thereof to obtain a plurality of chips. The dividing method includes a first cutting step of cutting the workpiece along the first division lines and a second cutting step of cutting the workpiece along the second division lines. In at least the second cutting step, the outer circumference of the workpiece at the cut end of each second division line is not cut to form an uncut region, thereby suppressing the formation of waste chips.

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Patent Owner(s)

Patent OwnerAddress
DISCO CORPORATION13-11 OMORI-KITA 2-CHOME OTA-KU TOKYO 143-8580

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirosawa, Shunichiro Tokyo, JP 6 11

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