Wavelength tunable interference filter, method for manufacturing wavelength tunable interference filter, optical module, and electronic apparatus
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United States of America Patent
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Mar 7, 2017
Grant Date -
Jul 10, 2014
app pub date -
Dec 30, 2013
filing date -
Jan 7, 2013
priority date (Note) -
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Abstract
A wavelength tunable interference filter includes an electrostatic actuator that changes the dimension of a gap between a fixed reflection film and a movable reflection film, a fixed drawn electrode and a movable drawn electrode that are connected to the electrostatic actuator, and a third substrate having a top surface portion and a sidewall portion. An end surface of the sidewall portion is bonded to a first substrate so that a space surrounded by the top surface portion, the sidewall portion, and the first substrate is hermetically sealed. A second substrate and the electrostatic actuator are disposed in the space, and the fixed drawn electrode and the movable drawn electrode are disposed on the first substrate and extend both inside and outside the space.
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